PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION
Ni-Cr and Fe-Cr-Al films deposited on the Al2O3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance value on density and evaporation parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2×10-4 pa, respectively.
作 者： X.W.Shi Z.Y.Liu D.C.Zeng C.M.Li 作者单位： Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China 刊 名： 金属学报(英文版) ISTIC EI 英文刊名： ACTA METALLURGICA SINICA 年，卷(期)： 2003 16(4) 分类号： 关键词： vacuum evaporation resistance of film vacuity