Study on impurity desorption induced by femtosecond pulse laser based on a stochastic process model
With the advantages on non-equilibrium heating and desorption induced by electronic transition, the femtosecond pulse laser introduces a new way for solving the problem of impurity pollution adsorbed on a solid thin film in micro-electro-mechanical systems (MEMS). A model based on stochastic processes was established for stimulated desorption induced by the femtosecond pulse laser to interpret the interaction of the optically excited hot electrons with the adsorbed molecules in a metal substrate. Numerical simulation results reveal a time-dependent desorption probability of adsorbed molecules and indicate that how key parameters of femtosecond pulse laser, such as incident laser energy flux, pulse duration, and wavelength of pulse, have a great effect on the desorption probability.
作 者： CHI Yinsheng LIN Xiaohui ZHUANG Ping CHEN Yunfei 作者单位： CHI Yinsheng,LIN Xiaohui,ZHUANG Ping(Department of Mechanical Engineering, Southeast University, Nanjing 210096, China)CHEN Yunfei(Department of Mechanical Engineering, Southeast University, Nanjing 210096, China;Key Laboratory of MEMS of China Educational Ministry, Southeast University, Nanjing 210096, China)
刊 名： 中国科学E辑（英文版） SCI 英文刊名： SCIENCE IN CHINA SERIES E:TECHNOLOGICAL SCIENCES 年，卷(期)： 2006 49(1) 分类号： O4 关键词： desorption femtosecond pulse laser stochastic process