全柔性机构与MEMS

全柔性机构与MEMS

时间:2012-07-22 政治理论论文
摘要:柔性机构是一种新型机构。首先描述了柔性机构和全柔性机构的概念及特点,论述了它们与MEMS之间的关系。然后详细介绍了全柔性机构在MEMS领域内包括微装配、微操作等应用背景下的状况及前景。最后就对全柔性机构研究中的几个关键技术问题如机构的分析、设计及加工,柔性铰链的选择与设计,驱动器的选择及设计等进行了探讨。Abstract:Compliant mechanisms are devices that deliver a desired motion by undergoing elastic deformation. A typical compliant mechanisms is called fully compliant mechanism. Owing to their serveral significant advantages relative to c onventional mechanisms such as no backlash and friction, and no assembly, complia nt mechanisms especially fully compliant mechanisms have been applied to many fields especially in MEMS. So research on compliant mechanisms and fully compliant mechanisms has been a hot issue in recent years. This paper firstly describes their concepts, characteristics and applications in MEMS. Finally several critical techniques and tendencies such as the analysis, design and fabrication of fully compliant mechanisms, selection and design of flexure hinge, selection, desgin and control of the actuator etc. are discussed. 作者: 于靖军  宗光华  毕树生 Author: YU Jing-jun  ZONG Guang-hua  BI Shu-sheng 作者单位: 北京航空航天大学机器人研究所, 期 刊: 光学精密工程   ISTICEIPKU Journal: OPTICS AND PERCISION ENGINEERING 年,卷(期): 2001, 9(1) 分类号: ATP23 关键词: 柔性机构    全柔性机构    柔性铰链    微型机电系统    机标分类号: TH1 TP2 机标关键词: 全柔性机构    compliant mechanisms    elastic deformation    flexure hinge    设计    选择    柔性铰链    技术问题    微装配    微操作    驱动器    状况    应用    描述    加工    概念 基金项目: 国家自然科学基金,国家高技术研究发展计划(863计划) 全柔性机构与MEMS[期刊论文]  光学精密工程 --2001, 9(1)于靖军  宗光华  毕树生柔性机构是一种新型机构。首先描述了柔性机构和全柔性机构的概念及特点,论述了它们与MEMS之间的关系。然后详细介绍了全柔性机构在MEMS领域内包括微装配、微操作等应用背景下的状况及前景。最后就对全柔性机构研究中的几个...