Deposition of ZnO thin films on (100) γ-LiAlO2 substrate
Optical properties for ZnO thin films grown on (100) γ-LiAlO2 (LAO) substrate by pulsed laser deposition method were investigated. The c-axis oriented ZnO films were grown on (100) γ-LiAlO2 substrates at the substrate temperature of 550 C. The transmittance of the films was over 85%. Peaks attributed to excitons were shown in absorption spectra, which indicated that thin films had high crystallinity. Photoluminescence spectra with the maximum peak at 540 nm were observed at room temperature, which seemed to be ascribed to oxygen vacancy in the ZnO films caused by diffusion of Li from the substrates into the films during the deposition.
作 者： Jun Zou Shengming Zhou Xia Zhang Fenglian Su Xiaomin Li Jun Xu 作者单位： Jun Zou(Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800;Graduate School of the Chinese Academy of Science, Beijing 100039)Shengming Zhou,Jun Xu(Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800)
Xia Zhang,Xiaomin Li(Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050)
Fenglian Su(Anhui University,Anhui,100086)
刊 名： 中国光学快报（英文版） EI SCI 英文刊名： CHINESE OPTICS LETTERS 年，卷(期)： 2005 3(8) 分类号： 关键词：