External-Cavity Tunable Laser Using MEMS Technology
This paper introduces a tunable external-cavity diode laser using a MEMS vertical mirror fabricated on a silicon-on-insulator (SOI) wafer. This laser has the merits of simple alignment process, easy integration/packaging, and potentially large wavelength tuning range.
作 者： J. Z. Hao X. M. Zhang C. Lu A. Q. Liu 作者单位： J. Z. Hao(Institute for Infocomm Research, Unit 230, Innovation Center, Block 2, 18 Nanyang Drive, Singapore 639798)X. M. Zhang,A. Q. Liu(School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue Singapore 639798)
C. Lu(School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue Singapore 639798;Institute for Infocomm Research, Unit 230, Innovation Center, Block 2, 18 Nanyang Drive, Singapore 639798)
刊 名： 光学学报 ISTIC EI PKU 英文刊名： ACTA OPTICA SINICA 年，卷(期)： 2003 23(z1) 分类号： O4 关键词：